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Accueil > Pages Personnelles > A-B > Jean-Paul Booth

Jean-Paul Booth


Status : Research Director, 1st class, CNRS
Low Temperature Plasmas Team

Email : jean-paul.booth lpp.polytechnique.fr
Tel : +33(0)1 6933 5902

Room : 05-1096A
Laboratoire de Physique des Plasmas
Ecole Polytechnique, route de Saclay
F-91128 Palaiseau Cedex


Research interests

Chemistry and physics of reactive gas plasmas interacting with surfaces.
Plasma etching for microelectronic device manufacture, especially fluorocarbon plasmas for dielectric etch applications.
Development of novel diagnostic techniques for reactive plasmas : optical techniques for measuring reactive species densities and kinetics, electric fields, and electrical plasma measurements.
Development of sensors for in-situ control of industrial plasma processes.
Laser-induced fluorescence, Ion Flux Probes, cavity ring-down spectroscopy, broad-band absorption spectroscopy, microwave resonance techniques for electron density measurements.
Gas breakdown in RF fields.

Brief vitae

2000-Present : Directeur de Recherche, CNRS at LPP (ex-LPTP), except :
2006-2008 : Technical Director, Lam Research Corp, Fremont, CA, USA
1990-2000 : Chargé de Recherche, CNRS, Laboratoire de Spectrométrie Physique, Grenoble
1988-1990 : Post-doctoral researcher, CNRS/CNET, Meylan, France
1985-1988 : D. Phil., Physical Chemistry Laboratory, Oxford University, UK
1980-1984 : BA & MA, Chemistry, Oxford University, UK

Distinctions :
2010 : Fellow of AVS
1984 : Physical Chemistry Part II Thesis Prize, Oxford University
1980-1983 : Stapeldon Scholarship to Exeter College, Oxford

Conference organisation and editorial responsabilities
Editorial board of Plasma Sources, Science and Technology
Program Commitee, ICPP 2014
Chair, Laser-Aided Plasma Diagnostics 2013& 2015
Secretary, Plasma Science and Technology Division , AVS 2012-13
Chair, International Conference on Phenomena in Ionised Gases, 2009

Recent publications

Power coupling mode transitions induced by tailored voltage waveforms in capacitive oxygen discharges
Aranka Derzsi, Bastien Bruneau, Andrew Robert Gibson, Erik Johnson, Deborah O’Connell, Timo Gans, Jean-Paul Booth and Zoltán Donkó,
Plasma Sources Sci. Technol. 26 (2017) 034002

Measurement of the isotope shift of the 2p4 3P2 -> 2p33p 3P2 two-photon transition of O I and a revision of the triplet energy levels of atomic Oxygen
D Marinov, J-P Booth, C Drag and C Blondel, J. Phys. B : At. Mol. Opt. Phys. (accepted 2016)

The role of thermal energy accommodation and atomic recombination probabilities in low pressure oxygen plasmas
Andrew Robert Gibson, Mickael Foucher, Daniil Marinov, Pascal Chabert, Timo Gans, Mark J. Kushner and Jean-Paul Booth,
Plasmas Physics and Controlled Fusion 59 (2017) 024004

Pressure broadening of atomic oxygen two-photon absorption laser induced fluorescence,
Daniil Marinov, Cyril Drag, Christophe Blondel, Olivier Guaitella, Judith Golda, Bart Klarenaar, Richard Engeln, Volker Schulz-von der Gathen and Jean-Paul Booth,
Plasma Sources Sci. Technol. 25 (2016) 06LT03

Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF4,
S Brandt, B Berger, E Schüngel, I Korolov, A Derzsi, B Bruneau, E Johnson, T Lafleur, D O’Connell, M Koepke, T Gans, J-P Booth, Z Donkó and J Schulze,
Plasma Sources Sci. Technol. 25 045015 (2016)

High sensitivity ultra-broad-band absorption spectroscopy of inductively coupled chlorine plasma
Daniil Marinov, Mickaël Foucher, Ewen Campbell, Mark Brouard, Pascal Chabert and Jean-Paul Booth,
Plasma Sources Sci. Technol. 25 (2016) 035019

Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas
B. Bruneau, I. Korolov, T. Lafleur, T. Gans, D. O’Connell, A. Greb, A. Derzsi, Z. Donko, S. Brandt, E. Schuengel, J. Schulze, E. Johnson, and J.-P. Booth
Journal of Applied Physics 119, 163301 (2016)

Controlling the shape of the ion energy distribution at constant ion flux and constant mean ion energy with tailored voltage waveforms
Bastien Bruneau, Trevor Lafleur, Jean-Paul Booth and Erik Johnson
Plasma Sources Sci. Technol. 25 025006 (2016)

Tailored voltage waveform capacitively coupled plasmas in electronegative gases : frequency dependence of asymmetry effects
E Schüngel, I Korolov, B Bruneau, A Derzsi, E Johnson, D O’Connell,T Gans, J-P Booth, Z Donkó and J Schulze
J. Phys. D : Appl. Phys. 49 265203 (2016)

Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas : comparison of Ar, H2 and CF4
B Bruneau, T Lafleur, T Gans, D O’Connell, A Greb, I Korolov, A Derzsi, Z Donkó, S Brandt, E Schüngel, J Schulze, P Diomede, D J Economou, S Longo, E Johnson and J-P Booth
Plasma Sources Sci. Technol. 25 01LT02 (2016)

Experimental and simulation study of a capacitively coupled oxygen discharge driven by tailored voltage waveform
A Derzsi, T Lafleur, JP Booth, I Korolov and Z Donkó
Plasma Sources Sci. Technol. 25 (2016) 015004

A computational analysis of the vibrational levels of molecular oxygen in low-pressure stationary and transient radio-frequency oxygen plasma
E Kemaneci, JP Booth, P.Chabert, J Van Dijk, T Mussenbrock, RP Brinkmann,
Plasma Sources Science and Technology 25 (2) 025025 (2016).

Gas Temperature Measurements in Oxygen Plasmas by High-Resolution Two-Photon Absorption Laser-Induced Fluorescence
J-P. Booth, D.Marinov, M Foucher, O. Guaitella, D. Bresteau, L. Cabaret and C Drag
J. Intrum. 10 C11003 (2015)

Highly vibrationally excited O2 molecules in low-pressure inductively-coupled plasmas detected by high sensitivity ultra-broad-band optical absorption spectroscopy
M Foucher, D Marinov, E Carbone, P Chabert and JP Booth
Plasma Sources Sci. Technol. 24 042001 (2015)

Strong Ionization Asymmetry in a Geometrically Symmetric Radio Frequency
Capacitively Coupled Plasma Induced by Sawtooth Voltage Waveforms

B Bruneau, T Gans, D O’Connell, A Greb, E V. Johnson and JP Booth
Phys. Rev. Lett. 114, 125002 (2015)

Control and optimization of the slope asymmetry effect in tailored voltage waveforms for capacitively coupled plasmas
B Bruneau, T Novikova, T Lafleur, J P Booth and E V Johnson
Plasma Sources Sci. Technol. 24 (2015) 015021

TALIF measurements of oxygen atom density in the afterglow of a capillary nanosecond discharge
A V Klochko, J Lemainque, J P Booth and S M Starikovskaia
Plasma Sources Sci. Technol. 24 025010 (2015)

PDF - 856.5 ko





Full list of publications and invited conferences



Recent Invited Conferences :

Quantitative Diagnostics of Inductive Plasmas in Chlorine, Oxygen and Chlorine-Oxygen Mixtures.
MRS-Japan. Yokohama, 8-10 December 2015.

Quantitative diagnostics of inductive plasmas in Cl2, O2 and CL2/O2, Jean-Paul Booth, Mickäel Foucher, Daniil Marinov and Pascal Chabert,
SAPP XX, Tatranska Lomnica, Slovakia, 17-22 January 2015

Dynamique des Plasmas à Couplage Inductive dans les gaz HBr, Cl2 et O2 et mixtures : Diagnostiques Laser et Absorption Ultraviolet Large-Bande,
Colloque de Plasma-Québec, Montréal, 4-6 June 2014

PDF - 483.6 ko





PhD subject proposal : Vacuum Ultraviolet Diagnostics of Discharges in O2 (financed by Labex Plasapar)


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