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Jean-Paul Booth
Status : Research Director, CNRS
Email : jean-paul.booth lpp.polytechnique.fr
Tel : +33(0)1 6933 5902
Room : 05-1096A
Laboratoire de Physique des Plasmas
Ecole Polytechnique, route de Saclay
F-91128 Palaiseau Cedex
Research interests
Chemistry and physics of reactive gas plasmas interacting with surfaces.
Plasma etching for microelectronic device manufacture, especially fluorocarbon plasmas for dielectric etch applications.
Development of novel diagnostic techniques for reactive plasmas : optical techniques for measuring reactive species densities and kinetics, electric fields, and electrical plasma measurements.
Development of sensors for in-situ control of industrial plasma processes.
Laser-induced fluorescence, Ion Flux Probes, cavity ring-down spectroscopy, broad-band absorption spectroscopy, microwave resonance techniques for electron density measurements.
Gas breakdown in RF fields.
Recent publications
Nanocrystalline silicon film growth morphology control through RF waveform tailoring,
Erik V. Johnson, Thomas Verbeke, Jean-Charles Vanel, and Jean-Paul Booth,
J. Phys. D : Appl. Phys. 43 (2010) (in press)
Electron drift velocity in SF6 in strong electric fields determined from rf breakdown curves,
V Lisovskiy, V Yegorenkov, J-P Booth, K Landry, D Douai and V Cassagne,
J. Phys. D : Appl. Phys. 43 385203 (2010)
Surface loss rates of H and Cl atoms in an inductively coupled plasma etcher using time-resolved electron density and optical emission measurements
G. A. Curley, L. Gatilova, S. Guilet, S. Bouchoule, J.P.Booth, G. S. Gogna, N. Sirse, and S. Karkari
J. Vac. Sci. Technol. A, 28, 360-372 (2010)
Dual frequency capacitive radiofrequency discharges : Effect of low-frequency power on electron density and ion flux
J P Booth, G Curley, D Marić and P Chabert
Plasma Sources Science & Technology,19, 015005 , (2010)
Electron transport coefficients in mixtures of CF4 and CF2 radicals
Nikitovic, Z. D., Stojanovic, V. D., Booth, J. P., Petrovic, Z. L.
Plasma Sources Science & Technology, 18, 35008 (2009)
Similarity law for rf breakdown
V. Lisovskiy, J.P. Booth, K. Landry, D. Douai, V. Cassagne, V. Yegorenkov
EPL, 82 (2008) 15001
Modes of low-pressure dual-frequency (27/2 MHz) discharges in hydrogen
V Lisovskiy, J-P Booth, K Landry, D Douai, V Cassagne, V Yegorenkov
Plasma Sources Sci. Technol. 17 (2008) 025002
Applying RF current harmonics for end-point detection during etching multi-layered substrates and cleaning discharge chambers with NF3 discharge
V Lisovskiy, J-P Booth, K Landry, D Douai, V Cassagne, V Yegorenkov
Vacuum 82 (2008) 321–327
Negative ions in single- and dual-frequency capacitively coupled fluorocarbon plasmas
G A Curley, D Maric, J-P Booth, C S Corr, P Chabert and J Guillon
Plasma Sources Sci. Technol 16 S87-S93 (2007)
Full list of publications
Brief vitae
2000-Present : Directeur de Recherche, CNRS at LPP (was LPTP), except :
2006-2008 : Technical Director, Lam Research Corp, Fremont, CA, USA
1990-2000 : Chargé de Recherche, CNRS, Laboratoire de Spectrométrie Physique, Grenoble
1988-1990 : Post-doctoral researcher, CNRS/CNET, Meylan, France (European Commission fellowship)
1985-1988 : Graduate student, Physical Chemistry Laboratory, Oxford University, UK
1983-1984 : MA, Chemistry, Oxford University, UK (1984 Physical chemistry Thesis Prize)
1980-1983 : BA Chemistry, Exeter College, Oxford University, UK (Stapeldon Scholar)
Propositions de thèse
- These ICP Cl2
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