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Pascal Chabert
Status : Group leader
Email : pascal.chabert lpp.polytechnique.fr
Tel : +33(0)169335940
Room : 05-1095A
Laboratoire de Physique des Plasmas
Ecole Polytechnique, route de Saclay
F-91128 Palaiseau Cedex
Research interests
Radiofrequency Plasmas – Electronegative Plasmas – Plasma Processing – Plasma Thrusters.
Publications (2009)
Fluid model of an electronegative discharge with magnetized electrons and unmagnetized ions
G. Leray, P. Chabert, A.J. Lichtenberg and M.A. Lieberman
J. Phys. D : Appl. Phys. 42 (2009) 194020
Competitive effects of an axial magnetic field and of neutral gas depletion in a positive column
L. Liard, J.L. Raimbault and P. Chabert
Phys. Plasmas, 16 (2009) 053507
Electric propulsion using ion-ion plasmas
A Aanesland, A Meige and P Chabert
J. Phys. : Conf. Ser. 162 (2009) 012009
Global model of instabilities in low-pressure inductive chlorine discharges
E. Despiau-Pujo and P. Chabert
Plasma Sources Sci. Technol. 18 (2009) 045028
Dual-frequency capacitive radiofrequency discharges : effect of low-frequency power on electron density and ion flux
J P Booth, G Curley, D Maric and P Chabert
Plasma Sources Sci. Technol. 19 (2009) 015005
Velocity distribution function of sputtered gallium atoms during inductively coupled argon plasma treatment of a GaAs surface
E. Despiau-Pujo, P. Chabert, R. Ramos, G. Cunge, N. Sadeghi
J. Vac. Sci. Technol. A, Vol 27 (2009) 356
Investigation of InP etching mechanisms in a Cl2/H2 inductively coupled plasma by optical emission spectroscopy
L. Gatilova, S. Bouchoule, S. Guilet, P. Chabert
J. Vac. Sci. Technol. A, Vol. 27 (2009) 262
Edge-to-center plasma density ratio in high density plasma sources
J.L. Raimbault and P. Chabert
Plasma Sources Sci. Technol. 18 (2009) 014017
Full list of publications
Brief vitae
Pascal Chabert obtained his Master and PhD in plasma physics at Orsay University (Orsay, France) in 1996 and 1999 respectively. After his PhD, he worked for eight months at the University of California at Berkeley (Berkeley, USA) as a Visiting Postdoctoral Researcher in the group of Professor Michael A. Lieberman. In 2000 he entered the CNRS to work at the Ecole Polytechnique as a researcher in the Plasma Physics Laboratory. His main research field is plasma physics and plasma processing. During his PhD, he has developed industrially relevant processes such as high-rate SiC etching. During and after his post-doc, his research interest has gradually moved towards more fundamental plasma physics issues. His main research area is now diagnostics and modelling of instabilities, non-linearities and non-uniformities in electronegative radiofrequency discharges used for plasma processing. He has also patented a new concept of plasma thrusters that is currently developed with the support of the European Community, The French Research National Agency (ANR) and EADS/Astrium. He teaches “Physics of radiofrequency Plasmas” at graduate levels and in various industrial training courses. He received the 2007 IUPAP Young Scientist Prize in Plasma Physics.
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